Used EMITECH / EMCORE K575X #9250890 for sale

EMITECH / EMCORE K575X Sputtering Equipment is a versatile, multi-target mass production tool with a unique sputtering deposition technology. It is designed for deposition applications such as barrier/adhesion layers and metal layers in the semiconductor industry. Its design offers flexibility and high productivity with superior process control, minimal maintenance and high-purity deposition. The system utilizes EMCORE patented magnetron sputtering deposition process which creates a controlled, uniform deposition across multiple substrates. This technology provides an even rate of deposition, directionality and lower electron radiation resulting in better uniformity. Additionally, the use of magnetrons reduces material cost, since the sputtering targets remain stationary and never have to be replaced. EMCORE K575X unit is built with a five-target, direct-drive sputter cathode, each of which can be loaded with up to four sputtering targets. This direct drive machine allows for high deposition rates while providing uniform coverage. It also offers a wide range of processing times and flexible recipes to meet the demands of production workloads. EMITECH K575X utilizes precision motion controllers and an automation tool to control the motion of the sputter cathode. This allows for accurately controlled layer composition and thickness, as well as the ability to program complex layers for maximum process efficiency. The asset also boasts two independent ion sources with a range of beam energies, currents and beam geometry to maximize the quality of the deposition. The sputter chamber is equipped with integrated high-speed processing, backside cooling of substrates, and rotational and tilt-angle features. This ensures precise, homogenous coating coverage on a variety of flat substrates, including semiconductor wafers for photovoltaic cell and memory components. K575X is powered by a cleanroom-environment power supply with additional shielding for maximum safety. In addition, the model is designed to meet global safety standards and can be integrated with process control systems such as APC/MPC. Overall, EMITECH / EMCORE K575X Sputtering Equipment is an easy-to-use, reliable and efficient sputter deposition tool. It is ideal for high-throughput coating and barrier/adhesion layer applications for the semiconductor industry. It offers precision and cost-effective deposition at high throughput rates while ensuring maximum safety in the cleanroom environment.