Used LEYBOLD / BALZERS ZH 620 Corona #9236460 for sale
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ID: 9236460
Wafer Size: 5"
Vintage: 2000
Al Fill sputter deposition system, 5"
(2) Targets
Palette: (8) Wafernests, 5"
Material: Aluminium Oxide
Simultaneous RF and DC sputtering
Bias option: Up to 300V deposition of deep flanks
Rotating magnet array option
RF Generators:
HUTTINGER PFG 2500
(2) HUTTINGER PFG 5000
Pinnacle DC power supply
BROOKS Mag-7 Robot (P/N: 201600-11)
BROOKS Marathon Express MX400 Wafer handler
BROOKS VCE6 Vacuum cassette elevator load lock
Upper matchbox: UNAXIS MBN-03-0100-0410
Lower matchbox: UNAXIS MBN-04-0100-0420
Table lift motors: DUNKERMOTOREN RE30-3-512 + TI.5V
Table rotate motors: DUNKERMOTOREN RE30-3-512 + TI.5V
2000 vintage.
LEYBOLD / BALZERS ZH 620 Corona is an advanced sputtering equipment designed to deposit thin films of various materials onto a substrate via a series of cathodic arcs. It is a highly versatile tool used in semiconductor processing and development, enabling the preparation of nanostructures for various applications. LEYBOLD ZH 620 Corona comprises a high-resolution target chamber, a compact magnetron arrangement, a rotating/tilting lid, and an efficient cooling mechanism. The high-resolution target chamber ensures precise machining of nanostructures, while the magnetron arrangement allows for the alteration of the deposition process by varying the number and position of cathodic arcs. The rotating and tilting lid broadens the range of exposed angles. BALZERS ZH 620 Corona features a powerful turbomolecular pump to ensure a continuous supply of uninterrupted process gases. This system is also capable of producing a wide range of custom shapes, controlling the quality of the sputtered materials. ZH 620 Corona can be operated in either manual mode or semi-automatic mode. This allows for a user-controlled operation which ensures a precise control of the parameters of the deposition process. This also provides the possibility of performing real-time analyses of the produced films granulometry. LEYBOLD / BALZERS ZH 620 Corona is exceptionally efficient, thanks to its optimized incident target current for its cathodic arcs, making it an ideal option for sputtering thin films. Additionally, this machine is suitable for a wide range of applications, including obtaining transparent conducting oxides (TCOs) and for producing coated implants. LEYBOLD ZH 620 Corona is totally equipped with safety measures, such as a lid-closure interlock unit and automatic nozzle shut-off. Also, it is possible to monitor and adjust the machine parameters, such as the process temperature, pressure and temperature of the pumping chamber. In conclusion, BALZERS ZH 620 Corona is an efficient and reliable tool for sputtering thin films and nanostructures. Equipped with a variety of advanced features, this machine allows for the precise deposition process to ensure the highest quality of the produced filaments, resulting in cost savings and improved productivity.
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