Used LEYBOLD / BPS ZH 620 Corona #196509 for sale

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LEYBOLD / BPS ZH 620 Corona
Sold
ID: 196509
Vintage: 1996
Sputter tool, 4" Includes: Main body: R-Metal Corona RF Generator tower 1 RF Generator tower 2 Automatic controller Chiller Compressor PC / Monitor Spare parts Manual (2) Leybold pumps Heater 1996 vintage.
The LABOLDLEYBOLD / BPS ZH 620 Corona is a sputtering equipment designed for a variety of deposition applications. It uses direct-current and radio-frequency power to enable efficient sputtering in a variety of substrates and processes. It is designed for high-rate sputtering of single and multiple layers with uniformity throughout the substrate. The system includes an ion source, a planar magnetron, and a remotely controllable, multi-axis substrate stage. The ion source produces a highly uniform pre-cleaning plasm which is used to remove native oxides and contamination from surfaces before coating. The emitted ions are guided to the substrate surface by a set of focused collector plates. The intensity source is contained in a user-friendly modular design which features adjustable chamber walls and a removable, variable-height rail unit. This allows for easy access and reconfiguration of the machine for different processes. The planar magnetron sputter source can hold up to nine magnetron targets with up to three carriers each. This enables a wide range of depositions, including high-rate sputtering, step-coating, and multi-layer deposition. The targets can be quickly and easily changed with tool-free clamping mechanisms. Its Multi-Mode operation allows the deposition parameters to be precisely tailored to each substrate and deposition process. The tool also features a remotely controllable, multi-axis substrate processing stage. This enables precise motion and positioning of the substrate so that uniform deposits can be achieved throughout the entire surface. The substrate stage also includes independent bias and tilt controls to allow for optimal sputter coverage. This advanced asset is ideal for research, process development, and high-volumes of sputtering applications. It meets a variety of sputtering requirements and offers reliable and consistent performance. Its easy access and flexible configuration makes it suitable for a variety of processes. The LABOLDBPS ZH 620 Corona is a powerful and versatile sputtering model that is designed to help you achieve excellent results.
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