Used LEYBOLD HERAEUS Z550 #9213240 for sale

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ID: 9213240
Sputtering system (4) Magnetron cathodes D = 150mm Sputter down: Cathodes with D = 75mm D = 100mm possible with adapter flange Heating cathode position: Magnetron cathode HF Etching Manual adaptation network: HF Rotary shutter Plant and process visualization: Operating terminal, 9" Pumping system: With D40B / TMP 450.
LEYBOLD HERAEUS Z550 is a high-performance sputtering equipment designed for use in the semiconductor industry for creating thin film layers. It has an advanced control system that offers precise control, with options for pulsed dc sputtering, multi-target sputtering, and RF or dc ion plating processes. LEYBOLD Z 550 features a 5-zone, high-uniformity target assembly, incorporating a number of magnetic field configurations to better guide sputtered material. This unit also offers optional rotational sputtering to allow one to create high uniformity, even on large curved surfaces. HERAEUS Z550 is capable of processing a wide variety of materials, including oxides, nitrides, and metals. It has a fast sputtering rate, with a range of between 0.1 and 500 nanometers per second depending on the job requirements. Its computer-controlled process parameters can be quickly adjusted, while automatic process control systems ensure reliable operation. Z 550 is highly reliable, with low dispersions and defect rates. It has a large processing chamber with a high efficiency vacuum line, enabling deposition processes to be completed under optimal conditions. It is also equipped with a multi-port machine to allow multiple processes to be simultaneously completed. With its robust architecture, LEYBOLD HERAEUS Z550 can easily handle up to ten high-power targets. In terms of safety, LEYBOLD Z 550 incorporates a closed-loop control tool to keep the substrate temperatures below the maximum allowable levels. It also includes a series of safety features, such as a triple optical monitoring asset, to ensure safe operation. It is also designed to comply with the latest industry safety standards. Overall, HERAEUS Z550 is a powerful and reliable sputtering model designed for high-quality thin film layer deposition in the semiconductor industry. It has a high-uniformity target assembly, computer-controlled process parameters, and low defect rates. It also incorporates a variety of safety features, allowing for safe and reliable operation.
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