Used LEYBOLD HERAEUS Z700 #65623 for sale
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ID: 65623
Automatic sputtering system
Z700 stainless steel process chamber (ca. 710mm height x 710mm dia) on a coated mild steel frame
Chamber fitted with various flanges and ports
2 pair (4) PK 500 sputter cathodes with teflon isolators, magnets and 1 atmospheric boxes for inner cathodes
Inner chamber shielding kit
Substrate rotation stage incl. feed through, drive and drive gear
Sample/substrate stage will be supplied according to customer specification
V1, V2, V3 and V4 valves (chamber, rough vacuum, bypass and venting)
(3) MFC with shut off valves
Water distribution manifold with 6 lines
Each line has a pneumatically operated shut off valve in supply and flow monitor in the returns fitted.
Option 1:
Vacuum measurement system (1 no. rough vacuum and 1 no. high vacuum gauge, 1 no. MKS Baratron process gauge)
Option 2:
(4) heaters, 1.1 kW each (2 no. inside substrate carrier stage, 2 no. outside the stage)
Option 3:
(1) Leybold DK200 rotary vane rough vacuum pump
(1) Leybold RUVAC 501 booster pump
(3) Leybold TMP1000c turbo pumps with NT1000/1500 controllers
(1) stainless steel buffer box for mounting of (3) TMP1000c turbo pumps
Vacuum measurement system (1) rough vacuum and (1) high vacuum gauge, (1) MKS Baratron process gauge)
Option 4:
DC Power supplies (4) 6kW DC power supplies for DC sputtering.
LEYBOLD HERAEUS Z700 is a sputter equipment designed for the deposition of thin film materials on surfaces. It is an advanced and flexible sputter system that produces precise and uniform coatings for applications such as antireflective and electrochromic coatings, semiconductor encapsulation, and DBR (Distributed Bragg Reflector) layers. This unit features several advantages which make it an ideal choice for reliable and in-depth thin film deposition processes. The first advantage of Z700 is its broad processing flexibility. The machine is equipped with a variety of process and chamber configurations, giving users quick and easy access to unique configurations. LEYBOLD HERAEUS Z700 has a chamber volume of 200 liters and can operate with up to 8 targets at once, thus allowing multi-layer deposition. It also has an efficient gas injection tool for in-situ processes as well as ultra-high vacuum (UHV) tanks for ultra-clean, high accuracy results. Additionally, Z700 has an advanced control asset with automated, multi-step recipes for full customization of the sputtering process. The second major advantage of LEYBOLD HERAEUS Z700 is its outstanding productivity. This model offers 10 times higher deposition speed than conventional sputter systems, with a layer deposition rate of up to 465 nm/minute. This makes it suitable for mass production of high-quality thin films. The equipment also includes an automated, programmable digital microscope which allows users to quickly and easily examine the quality of the deposited film. The third advantage of Z700 is its reliable performance. This system is equipped with advanced fault detection technologies which can analyze the sputtering process and automatically shut down the unit when needed. Furthermore, LEYBOLD HERAEUS Z700 is designed with an advanced cooling machine which ensures optimal temperature stability and reduces the risk of thermal damage to the sputter targets. Additionally, the tool is equipped with an electronic feedback asset for real-time feedback on the process parameters and performance. Overall, Z700 is an advanced, highly efficient, and reliable sputter model designed for the deposition of a variety of thin film materials. With its broad processing flexibility, outstanding productivity, and reliable performance, LEYBOLD HERAEUS Z700 is an ideal choice for quick, accurate, and reliable thin film deposition processes.
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