Used MAT-VAC MVT-94X #9003937 for sale
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ID: 9003937
Sputtering system
Dual level load lock
CTI-8 cryo pump
Simultaneous processing of 12" x 12" pallets
DC Magnetron, RF Magnetron and RF diode sputtering capabilities
24 V DC components
Single and bi-directional substrate scanning modes
Vacuum gauging controls: Granville Philips 307 and Digivac
Proteus interlock water flow switches
208 V, 100 A, 60 Hz
Includes:
MAT-VAC modular electro-pneumatic valve bank
Hydraulic pump/motor and all lines
(2) Electro-pneumatic gate valves for process chamber and load lock with position sensing.
MAT-VAC MVT-94X is a state-of-the-art sputtering equipment designed for top-tier industrial grade deposition applications. The system combines exceptional flexibility and performance with a user-friendly graphical interface. The unit is rich in features, enabling users to quickly and accurately complete deposition processes with efficiency. MVT-94X features two independent magnetrons, which can be adjusted through the graphical user interface. Each magnetron can be operated with varying power levels, allowing users to customize their sputtering process. Additionally, a Faraday cage containing two separate thermal evaporation sources is also equipped with the machine, enhancing its sputtering capabilities. The tool is also equipped with a highly advanced automated process control asset. This model continually monitors all parameters of the sputtering process and adjusts them accordingly, allowing users to maintain consistent performance throughout the deposition cycle. This automated process control feature greatly reduces human error and substantially improves equipment performance. The sputtering system is also designed with a number of innovative safety features. A haloplex unit can be engaged to protect the user from hazardous particles or vapors that may be released during sputtering. Additionally, an integrated lockout machine prevents unauthorized personnel from accessing the tool. MAT-VAC MVT-94X is an impressive asset which combines advanced technology with versatility, making it an ideal choice for high volume industrial grade sputtering applications. The model's robust suite of features provides users with the capability to customize and optimize the sputtering process. Additionally, the equipment's automated process control system and haloplex unit ensure user safety and machine performance.
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