Used MRC 603 II #9011265 for sale

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MRC 603 II
Sold
Manufacturer
MRC
Model
603 II
ID: 9011265
Sputtering system (3) target Used for Argon and Nitrogen (1) MFC Uni-directional Currently installed.
MRC 603 II is an advanced sputtering equipment from Applied Materials. It utilizes a modular design to provide flexibility and scalability to ensure that customers have the ability to adapt the system to meet their specific needs and requirements. The unit includes a single source, direct current sputtering source (DCSS) capable of providing up to 18 targets for deposition on both flat and curved substrates, as well as a Xenon short pulse source that can provide up to 3 targets of depositions on the same workpiece. MRC 603-II offers a high throughput capability that enables it to handle large area substrates as well as process delicate substrates like optical filters. This machine offers excellent endpoint detection capabilities along with process repeatability that enables it to deliver consistent and high quality results, regardless of process complexity. 603 II also includes an advanced automated process control tool with the ability to control single targets, sequential targets, multi targets, and uniform sputter layers. This ensures that process conditions and substrate uniformity are maintained even during complex processes. Additionally, it features load-lock capabilities that allow for easy and secure transfer of substrates, as well as optional clean-room compatible roll-through and modular systems for large scale applications. The asset is also highly compatible with digital syringe control systems, allowing for ultra-fine coverage control. The integrated measurement model allows for monitoring of deposition rate and endpoint detection. In addition, the equipment features real-time recipe control to ensure that processes remain consistent and repeatable. 603-II is an exceptional choice for tools that demand high throughput, repeatability, and uniformity. It is designed for high-end applications requiring high quality films and is suitable for a variety of sputtering applications, such as flat-panel displays, semiconductors, MEMS, optics, and data storage.
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