Used OERLIKON / BALZERS 750 #9095626 for sale

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OERLIKON / BALZERS 750
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ID: 9095626
System.
OERLIKON / BALZERS 750 Sputtering Equipment is a powerful, robust, and reliable sputtering chamber designed to meet the highest demands in wafer-by-wafer uniformity, step coverage, edge exclusion, and level of ultimate process control. The system is powered by a high-performance magnetron source, capable of depositing uniform thin films over a range of substrates up to 7". The primary feature distinguishing BALZERS 750 from other sputter systems is its patented etchback configuration. This design allows for deep source penetration with precise edge exclusion control. The constant throughput of the plasma allows for steady sputtering operation and homogeneous film deposition on all parts of the wafer. The chamber capacity of OERLIKON 750 and its high pumping speeds also make it suitable for a variety of application processes, including anodizing, ion implanting, and de-impurity processes. With the option of more than one simultaneous source, users have flexibility in sputtering different materials on multiple targets. 750 is also equipped with the company's Multitarget sputtering technology, which allows for an unprecedented combination of nanotopography, composition, and morphology within the same sputter deposition. This patented unit also allows for optimization of barrier layer fabrication, such as adhesion promotion layers and diffusion barriers. OERLIKON / BALZERS 750's user-friendly monitoring software machine facilitates process control as well as feed-forward and feed-back looping based on the real-time data. This enables process workflows to be created and adapted to get the best results for any given application. The tool is also equipped with extremely accurate calibration systems, which monitor, measure, and report operating parameters during deposition. Finally, the patented temperature control asset of BALZERS 750 enables processes with very precise thermal ramping characteristics, which are essential for some application processes. This makes the model exceptionally reliable and highly precise, suitable for the toughest and most demanding manufactures needs.
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