Used OERLIKON Clusterline 200 #293636996 for sale

ID#: 293636996

Manufacturer:

OERLIKON

Vintage:

2005

Wafer Size:

8"

Equipment Details:

PVD System, 8" (6) Chambers Chemicals: AI, Ti, NiV, AG CLN200-1 BROOKS AUTOMATION MX800 Etch chamber: PM2 PVD Chambers: PM1, PM3, PM4, PM5, PM6 Process chamber: Heated chuck Magnet types: PM1 MB300DL PM3 MB300DG PM4 MB300DK PM5 MB300DL PM6 MB300DF 2005 vintage.
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