Used PERKIN ELMER 2400 #9022812 for sale

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Manufacturer
PERKIN ELMER
Model
2400
ID: 9022812
Sputtering system CTI-8 cryo pump Power supply in separate cabinet Veeco RG1000 pressure gauge MKS Baratron (4) Targets Welch mechanical pump Argon and Nitrogen are plumbed in Flows are controlled by MFCs Power is RF only Sputtered: silicon.
PERKIN ELMER 2400 Sputtering System is a world-leading sputtering tool that provides precise deposition layers for thin films, nanostructures, and multi-layer stacks on substrates. It is ideal for a variety of applications, from precision coating to fabrication of opto-electronic and MEMS-based devices. With its robust, high-throughput design, it is capable of achieving uniform sputtering at high deposition rates with accuracy and precision. The machine is equipped with a variable-area load-lock chamber that can accommodate substrates up to 200 mm in diameter, as well as multiple planetary targets that are capable of sputtering multiple metals and a wide range of alloys. The targets are mounted on a patented sputter-less DC power source that can simultaneously drive up to six targets equipped with independent RF sources. The high-voltage DC source coupled with the RF generators enables highly uniform coatings over large areas as well as superior deposition rates at target temperatures up to 400 °C. 2400 has temperature-dependent process control capability that enables the deposition of nanostructures, thin-film stacks, and other material-based devices with consistent quality and repeatability. Temperature uniformity and reproducibility is monitored using a pyrometer with a resolution of ± 0.1 °C. Advanced RF process monitoring provides for real-time feedback on substrate temperatures to ensure optimal substrate cleansing and deposition results. The system also features perpendicular sputtering technology with floor-standing end-effectors that enables 3D coating. It is equipped with an on-board programmable pulse generator that can be used to vary the pulse frequency and width profiles for optimal coating results. A scanning electron microscope hosted in the chamber can be used to in-situ monitor the deposition process. PERKIN ELMER 2400 is designed to accommodate up to nine different bayonet-fitted pedals that are equipped with various tools needed for sample loading and unloading, substrate handling, and deposition. The system also has an intuitive graphical user interface and offers complete Computer-aided Manufacturing (CAM) control with full software compatibility. 2400 is an ideal solution for high-performance sputtering applications, providing superior precision, reliability, and throughput.
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