Used TRIKON / ELECTROTECH MS 6210 #178693 for sale

TRIKON / ELECTROTECH MS 6210 is a highly complex sputtering equipment designed to deposit thin films of various materials on a variety of substrates. The system consists of an ultra high vacuum chamber, a controller, and a power supply. The chamber is designed to maintain a vacuum up to 1.33 x 10-6 Pa with a turbo pump speed of 3.2 liters per second. The controller is connected to the power supply, allowing for precise control over the sputtering process. The chamber of the unit is cylindrical in shape and is equipped with a top-mounted chamber flange and a top-mounted drain port. The chamber flange is designed with three arm and cone ports to allow for easy loading and unloading of substrates. There are also two bottom-mounted nitrogen gas ports and two top-mounted gas inlets, providing precise control over the active gas flow in the machine. The chamber is heated by four thermoelectric heaters, allowing for uniform coverage of the heated surface of the substrate. The vacuum tool consists of two turbomolecular pumps, a various vacuum gauges, and an ion gauge for accurate monitoring of the chamber's vacuum parameters. The asset is also equipped with an anti-contamination shutter and a roughing valve to minimize the contamination of the sputtered films. The power supply of the model is capable of providing a stable and uniform power supply to the sputtering source regardless of variations in voltage and current. There are three control channels with independent voltage and current control, allowing for precise adjustment of the power supply and the sputter rate. The controller is connected to the power supply and allows for precise control over the parameters of the sputter procedure such as the duty cycle, the sputter rate, and the target material. TRIKON MS 6210 sputtering equipment is capable of producing films with extremely high uniformity and surface smoothness. The films can also be deposited on various substrates, such as glass, stainless steel, and silicon, with excellent adhesion and excellent optical properties. The system is easy to use and provides precise control over the sputtering process.