Used TRIKON Sigma 200 #9311777 for sale

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Manufacturer
TRIKON
Model
Sigma 200
ID: 9311777
Wafer Size: 8"
Vintage: 1990
Sputtering system, 6" (2) Load locks: VCE A, VCE B Turbo pump, 8" Hot Sputter Etch (HSE) chamber (2) Deposition chambers: Ti / TiN, Al (2) PVD Chambers (3) Cryo compressors (8200 Type) Triple rack for RF power supply Turbo controller Dealer controller Main computer (CTC) Data logger computer AC Tray Rack controller Platen heater controller Half height rack for DC power supply Operating system: FlexOS Electrical cables Power box Cryolines Does not include: Mechanical pump RGA Controller.
TRIKON Sigma 200 is an advanced etcher/asher designed for medium-scale process development. Itshigh-precision performance and laser optics enable precise etching and ashing for optimal results. The equipment consistsof a six-axis robotic manipulator which is controlled by an intuitive, easy-to-use touch screen interface. The system featuresa robust construction designed to withstand harsh conditions and ensures reliable operation and accuracy. The Sigma 200provides a state-of-the-art design and is capable of etching and ashing a variety of materials such as glass, metal, ceramics,and liquid crystal polymers. Its ablation processes employ a wide variety of lasers, including UV, IR, and YAG. The symmetrical chamber design allowsfor repeatable medium-scale processes with excellent uniformity. Its 30 cm x 30 cm x 30 cm chamber size is perfect formedium-scale process development. It provides a dry and wet environment for etching and ashing, which allows for bettermaterial control and higher success rates. Its dynamic temperate control allows it to perform well even at high speeds. Sigma 200 can be adjusted to adapt the size of the dielectric mask to the devices being processed, allowingfor precise etching of feature sizes ranging from 0.05 to 5.00 mm. The high-precision mirror unit enables superior repeatability ofprocess parameters while providing the exact amount of photons needed for each process step. Its 3D image scanner andalignment systems enable faster alignment and alignment accuracy of up to 0.5 m. The machine is also equipped with a debris removal machine which prevents the accumulation of particles from the productduring the processing steps, ensuring the highest quality end product. TRIKON Sigma 200 also has a high-end safety tool thatincludes safety auto shut-off, an emergency stop switch, an interlock asset, and an exhaust hood. Sigma 200 has a maximum processing speed of 20 cm/min, which is perfect for medium-scale processes. It also has advancedthermo-flood and thermo-reflux methods that can be used to create uniform structures in as little as 2 minutes. With its intuitivetouch-screen interface, TRIKON Sigma 200 is simple to use and provides the highest accuracy and repeatability, ensuring reliableprocess results. With its high-precision performance, quartz and diamond coated laser optics, and high-end safety model, theSigma 200 is the perfect choice for performing medium-scale etched and ashed processes.
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