Used ULVAC Ceraus ZX-1000 #196190 for sale
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ID: 196190
Wafer Size: 8"
Vintage: 2001
PVD sputtering system, 8"
H2 anneal + (2) PVD chambers
Built-in SMIF
Software version 2.11C
Vacuum pump included
Cu contamination
2001 vintage.
ULVAC Ceraus ZX-1000 is a sputtering equipment designed to deposit thin film materials onto a variety of substrates. This system utilizes magnetron sputtering technology which can deposit high purity, adherent films with excellent step coverage and excellent repeatability. The unit also has a high process throughput with a reliable process control machine. The tool utilizes a linear track design which allows for higher deposition rates for efficient zero-point performance. The track has a large 8 x 8 inch process area with independent positional adjustment for each substrate position. For more precise film deposition, each substrate can be individually adjusted within the positioners. The asset also features three process chambers - two for Sputter and an optional deposition chamber - that can be operated independently or in hybrid modes to optimize thin film coatings. The model is capable of depositing a wide variety of thin film materials such as metals, alloys, ceramic materials, and organic materials. It features a broad range of sputtering targets, deposition emissions, and process gases. The equipment also utilizes a vacuum exhaust system with in-situ bakeout capability. ULVAC CERAUS ZX 1000 has the ability to perform two- and three-dimensional deposition patterns with its automated scanning pattern control and the flexibility to configure a range of architectures for a wide variety of applications. The unit is very user friendly and enable precise control during deposition. It has a visual operation screen to enable quick set up and easy monitoring. The integrated data link provides for real-time transfer of deposition data between target and substrate, to maximize overall product quality. The process levels are monitored and power and current can be adjusted in order to provide optimal conditions for the deposition. Settings can be stored and recalled for process repeatability. Ceraus ZX-1000 is designed for ultra-high deposition rates and is suitable for a variety of industrial applications, from production of semiconductor devices to prototyping of advanced materials. It is a reliable and efficient machine that is capable of producing high quality film coates with excellent repeatability.
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