Used ULVAC Ceraus ZX-1000 #9028395 for sale

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ULVAC Ceraus ZX-1000
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ID: 9028395
Sputtering system.
ULVAC Ceraus ZX-1000 is a high throughput, multi-purpose vacuum sputter equipment designed for a variety of thin film deposition applications. It is ideal for depositing oxide, nitrides, and semi-conductor thin films, such as silicon oxide, silicon nitride, titanium nitride, and titanium oxide. The system features a large 4-inch wafer capacity, up to three sputter sources, and a high-power RF disk sputter gun for hard coating applications. The unit also comes with a 10 megawatt RF generator for high-rate deposition. At the heart of ULVAC CERAUS ZX 1000 is its versatile sputtering deposition chamber. The chamber is constructed from stainless steel and has an interior volume of 50 litres. It also has a high-vacuum pump machine and a carrying chamber with shutter doors which allows for a quick exchange of substrates. The chamber is complemented by a magnetron sputter gun and an ion source for ion-assisted deposition. The tool's high-power RF disk sputter gun is included for hard coating applications. It has a maximum power output of 1.2kW and can deliver up to 600A of current. The gun is mounted on a job arm which is separately adjustable, allowing for precise adjustment of the center coordinates of the target. The gun can operate at pressure as low as 0.005Pa and has an adjustable target angle from 0-360° to meet the specific requirements of the user. Ceraus ZX-1000 is equipped with a high-precision instrumental measuring asset for all parameters of sputter deposition. The model incorporates a precision measuring crystal, which measures the power density, deposition speed, and angle of incidence. The data collection process is computer-controlled, allowing for precise control over the process parameters. The equipment is installed with a multi-user control panel with four language options, allowing for simultaneous real-time monitoring and data collection by multiple users. The drive system also comes with a 16-bit micro-processor which allows for precise control over deposition speed. The unit is also compatible with a range of platforms, such as PC and EPICS, to enable easy integration into existing software environments. All in all, CERAUS ZX 1000 is an outstanding sputter machine, perfect for processes ranging from precision thin film deposition to hard coating applications. It provides superior performance, excellent process accuracy, and an attractive price-performance ratio.
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