Used ULVAC MLX-3000N #9156851 for sale

ID#: 9156851

Manufacturer:

ULVAC

Model:

MLX-3000N

Vintage:

1997

Equipment Details:

Sputtering system
Multi chamber type (C to C)
Substrate size, 5"/6" combine

(2) Cassette-chambers
(3) Sputter chambers
Etching chamber

Vacuum pump:
Turbo molecular pump
Dry pump

Vacuum pumps:
Cryo pump
Cryo trap
Dry pump

Sputter source: Cathode, 12"
DC power source
Process gas: Ar

1997 vintage.
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