Used ULVAC MLX-3000N #9236593 for sale

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ULVAC MLX-3000N
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Manufacturer
ULVAC
Model
MLX-3000N
ID: 9236593
Wafer Size: 8"
Vintage: 1999
Sputtering system, 8" Etching chamber (3) SP Chambers 1999 vintage.
ULVAC MLX-3000N is a sputtering equipment made by ULVAC, a world leader in vacuum technologies. MLX-3000N is designed to deposit thin films and coatings on a variety of substrates, including electronics, optoelectronics, and semiconductors. The system utilizes high power sputtering with high purity gases to create thin, uniform films with excellent electrical and optical characteristics. ULVAC MLX-3000N has a powerful sputtering power supply capable of up to 2500W as well as a high-voltage EC power supply designed for high-density Ar/O2 and Ar/N2 sputtering. The unit utilizes up to three CVD/sputtering sources and four ion sources in a hybrid configuration, enabling the deposition of multi-component films with higher film thickness accuracy than competing systems. The multi-source design also allows for faster process times and greater process flexibility. The machine's automated temperature control, substrate staging, and in-situ process monitoring ensure repeatable results for large scale production. MLX-3000N also features load lock technologies to reduce substrate contamination and increase throughput. Through the use of intelligent, adaptive software, the tool is able to self-optimize for different materials and process parameters. ULVAC MLX-3000N can also be easily combined with other ULVAC technologies such as e-beam evaporators and plasma ion-assisted deposition systems to create customized sputtering systems to meet your exact needs. With its excellent performance and reliability, MLX-3000N is ideal for large scale production.
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