Used ULVAC MLX-3000N #9273657 for sale

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ULVAC MLX-3000N
Sold
Manufacturer
ULVAC
Model
MLX-3000N
ID: 9273657
Wafer Size: 5"
Sputtering system, 5" (3) Chambers.
ULVAC MLX-3000N is a low-vacuum sputtering equipment designed and manufactured by ULVAC, a renowned Japanese vacuum equipment manufacturer. MLX-3000N is an all-in-one platform for materials treatment. It is a single-chamber, low-vacuum sputtering system, with operating pressures ranging from 0.1-5.0 mbar. It can be used for a variety of applications and processes, such as physical deposition of materials, oxidation, nitridation, annealing, and deposition of multilayer nanocomposite films. ULVAC MLX-3000N has a closed type vacuum chamber equipped with direct-drive pumps, enabling fast evacuation from atmospheric pressure to the required working pressure. It is also equipped with a high-voltage unit, partially active SCR, and a manual chucking unit, as well as a residual gas analysis machine. This allows for precise control over the deposition process, enabling consistently excellent results. MLX-3000N is equipped with ULVAC unique manual chucking tool, allowing for a wide range of substrates of different sizes, shapes, and materials to be processed. It is capable of processing up to four substrates at once, allowing for a large throughput of samples. ULVAC MLX-3000N is equipped with an anti-reflection coating (ARC) option. This helps prevent thermal dissipation and back-reflection from targets during the sputtering process, and helps to ensure consistent film thickness for uniform films. MLX-3000N is also equipped with ULVAC in-situ monitoring feature, allowing for monitoring of temperature, deposition rate, thickness, etc. It also features an advanced closed-loop feedback control asset, which ensures precise and stable process control. Overall, ULVAC MLX-3000N is an excellent choice for materials treatment applications. Its single-chamber design and wide range of features allow for precise and consistent results. Its manual chucking model, in-situ monitoring, and advanced closed-loop feedback control make it an ideal equipment for customers who require high-quality results.
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