Used ULVAC SBH-2206 #9053709 for sale

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ULVAC SBH-2206
Sold
Manufacturer
ULVAC
Model
SBH-2206
ID: 9053709
Sputtering system.
ULVAC SBH-2206 is an ion-focused magnetron sputtering equipment designed for continuous sputter deposition of thin films. This system provides a plasma-assisted physical vapor deposition (PVD) process that uses an ion beam to focus and orient materials as a coating on a substrate. The process produces uniform films that are highly durable and chemically inert. SBH-2206 consists of a high-density, active-cooled, permanently magnetron-mounted cathode, a fabrication chamber, and an array of ion sources. The chamber contains multiple substrate holders to allow for efficient deposition over a large area. The substrate holder contains heaters and cooling fins to ensure uniform substrate temperature and consistent film quality. The vacuum unit is designed to maintain a process pressure of less than 10-4 Pa, providing a stable sputtering environment. The machine is equipped with a magnetron that contains a strong permanent magnet that creates a powerful magnetic field across the surface of the cathode and the substrate. This magnetic field confines and accelerates the energetic charged gaseous particles, resulting in the efficient sputtering of the cathode material. ULVAC SBH-2206 features a high-performance ion source with adjustable voltage and current levels, allowing deposition of high-quality thin films. The tool also has a burst mode feature to provide higher deposition rates and increased film uniformity. This feature uses short bursts of operation; while the magnetron is deactivated, the deposition progress is within the acceptable range. The asset is suitable for a variety of materials, such as metals, oxides, nitrides, and carbon. It can also be used to deposit multilayer films with high accuracy and stress-free coatings. SBH-2206 is a reliable and versatile sputtering model with excellent film quality and uniform deposition over the working area. It can be used to produce thin films for a variety of applications, including semiconductor devices, electronics, optics, energy storage, medical, and aerospace.
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