Used ULVAC SH 450 #9133526 for sale

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ULVAC SH 450
Sold
Manufacturer
ULVAC
Model
SH 450
ID: 9133526
Vintage: 1987
Sputtering system 1987 vintage.
ULVAC SH 450 is a sophisticated sputtering equipment designed by ULVAC Technologies, a Japanese manufacturer of deposition systems. SH 450 is capable of delivering a range of deposition atmospheres such as ultra-high vacuum (UHV), high-vacuum (HV), and low-pressure (LP) environments. It offers an efficient deposition process for a variety of materials including metals, dielectrics, and organics. ULVAC SH 450 is a DC sputtering deposition system that utilizes cathode sputtering to build up step-by-step layers of material on a substrate. In short, the unit uses a cathode target to bombard the substrate with ions, which excite the target material and cause it to vaporize. The ionized vaporized target particles then condense on the substrate surface to form a thin, uniform layer. SH 450 is equipped with two sources, each capable of sputtering up to 3.6 kW of power. In addition, it is capable of multi-source operations, allowing for simultaneous sputtering using up to four sources. Furthermore, the machine includes an independent gas inject tool that can introduce reactive gas such as oxygen, nitrogen, or argon to improve material properties. The asset offers a flexible platform for substrate heating, with a maximum temperature of up to 400°C. It also comes with a specially designed mounting model which allows sequential, horizontal, or vertical sputtering. In addition, ULVAC SH 450 includes a data acquisition equipment and a user-friendly graphic user interface, allowing for automated process control. In addition to the features mentioned above, SH 450 has several integrated safety functions that ensure a safe and reliable operation. These include an emergency stop function, an over-stress protector, and a backside support system. All of these features make the unit suitable for a variety of fabrication processes, ranging from small samples to large scale production. To sum up, ULVAC SH 450 is a sputtering machine that combines high-temperature deposition processes, flexible substrate heating, and reliable safety functions for complete deposition processes. It is suitable for a variety of materials and substrates, and is perfect for both small sample fabrication and large-scale production.
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