Used ULVAC SH-550 #9118829 for sale

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ULVAC SH-550
Sold
Manufacturer
ULVAC
Model
SH-550
ID: 9118829
Sputtering system.
ULVAC SH-550 is a sputtering equipment developed by ULVAC, Inc., an international manufacturer of industrial and scientific instruments, for use in thin-film deposition processes. It is based on the hybrid sputter ion source technology, which combines DC and RF power to achieve superior sputter results. The system is configured with two independent coatings sources, which operate either independently or in combination, offering high-precision thin-film deposition. SH-550 is a compact design, with an overall footprint of just 50 × 30 centimeters. It boasts a wide range of sputtering components such as ion gun, magnetron, planar magnetron, and a DC magnetron. All of these components are contact-less and can be moved to the desired position with ease. ULVAC SH-550 also features long-life power supplies and special gas boxes, which help reduce the consumption of process gases. The sputtering process is conducted in a vacuum chamber, with the upper chamber able to achieve vacuum levels up to 5 Pa and the bottom chamber up to 10 Pa. The substrate holder is adjustable and can accommodate substrates up to a size of 200 × 200 millimeters. The unit also features a load/unload mechanism, making it suitable for batch operations. The machine comes with a graphical user friendly interface, allowing operators to control and monitor the tool. Furthermore, a variety of in-situ diagnostics including spectroscopy, noise monitoring, and thermography can be performed in-situ to measure film thickness, uniformity, and performance. SH-550 offers various optional components which allow for the deposition of materials such as aluminum, brass, titanium, molybdenum, and tungsten. It is suitable for research, development, and industrial-scale production of thin-films. Moreover, the asset is adaptable for multi-usage, making it ideal for a range of deposition applications. In conclusion, ULVAC SH-550 is a reliable and advanced sputtering model designed for both research and production. Boasting a compact design, excellent process control, and a plethora of optional components, it is a versatile tool which can be deployed for a variety of deposition applications.
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