Used ULVAC SIH-450 #9313935 for sale

ULVAC SIH-450 is a high-end sputtering equipment designed and manufactured by ULVAC for a wide array of applications. This system is designed to provide reliable and consistent sputtering processing in the most challenging vacuum deposition applications. SIH-450 is a one-source solution for reactive and inert sputtering, as well as magnetron sputtering deposition. ULVAC SIH-450 has a workable area of 800mm x 600 mm and also comes with an integrated sinker that allows consistent wafer cooling in both as-deposited and post-deposition processes. With a temperature uniformity of +/- 0.5 °C, this unit ensures that processes are temperature and pressure optimized to provide highly uniform sputter deposition. The machine is equipped with independent power control for each target and maximum 12kW of DC power. It also has an ion source which can provide precise ion cleaning and assist in the sputtering process. Additionally, SIH-450 is equipped with a robust and reliable turbo molecular pump, joining ULVAC All-MFC (Monitored Flow Control) Consistent Sputter Deposition control to guarantee accurate molar flow control. The tool provides a wide range of adjustable chamber parameters such as vacuum level, process pressure, temperature, and time, all of which are extremely easy to control and monitor. This asset is also equipped with an intuitive touch screen interface that can be used to control sooth operation, provide real-time process data, and allow remote access. ULVAC SIH-450 can cover a wide range of processes such as PVD and CVD from thin film deposition to thick film deposition, as well as sputtering Si, Si-Ge, Si-C, and other substrates. With its excellent control performance, simple operation, and low operating costs, SIH-450 is a reliable and cost-efficient way to improve process yields and reduce cycle times.