Used UNAXIS / BALZERS LLS EVO #9237904 for sale

UNAXIS / BALZERS LLS EVO is a sputtering equipment designed for industrial, research and development settings. The system is designed for reliable, high-volume sputter deposition with advanced load handling and integrated process automation for high-throughput applications. This unit is capable of coating both large area substrates in production mode, as well as small samples for R&D use. It can incorporate up to sixteen independent individual process chambers, enabling fast and repeatable processes at high deposition rates and low thermal budget. The sputtering machine features UNAXIS Low Load Sputtering (LLS), a unique sputtering technology that provides a stable and uniform coating on both flat surfaces and deep cavities. To maintain high deposition rates, the LLS technology keeps the deposition area covered and constantly in motion, enabling a more uniform and higher deposition rate over traditional sputter techniques. The LLS technology also helps to ensure a lower thermal budget during the sputtering process, thus protecting delicate substrates. The tool is also outfitted with a state-of-the-art integrated process automation for full process control and repeatability. This includes programmable target tracking, load and unload programs, process recipes, and process history logging. Additionally, the asset's innovative load handling allows for up to twelve racks to be loaded at once, as well as automated pallet stacking to further streamline your production process. Furthermore, the model is also fitted with an environmentally-friendly design. All components, such as pumps, exhausters, tanks and filters, are designed for high-performance and energy efficiency. The equipment has low noise levels for a more pleasant working environment, making it an ideal choice for high-volume sputtering applications. Altogether, UNAXIS LLS EVO sputtering system is a versatile, reliable and efficient unit for sputter coating, offering a streamlined solution for high-volume applications. Its advanced automation, integrated process control and low thermal budget makes it ideal for coating both large area substrates and delicate substrates for research and development.