Used VARIAN 3190 #9097088 for sale

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Manufacturer
VARIAN
Model
3190
ID: 9097088
Wafer Size: 5"
Sputtering system, 5" (3) Targets Cryo pump Power supplies Currently warehoused.
VARIAN 3190 is a high performance, low cost sputtering equipment designed for use in the deposition of thin films. The system utilizes two independent sputter guns, and is compatible with a wide variety of substrate materials. 3190 is capable of producing thin films with a thickness range of 0.5 nm to 8.0 microns with exceptional film uniformity and excellent reproducibility. VARIAN 3190 features a robust mechanical design and advanced controls that provide superior process performance. The substrate is mounted on a rotating platform, allowing for uniform deposition across the surface of the substrate. The gun power supply is adjustable and is capable of achieving low incident energy densities and low duty cycles. Additionally, 3190 can be equipped with optional ion/plasma sources to provide desired film properties. The unit also offers a range of in-situ monitoring and diagnostic tools, such as thickness measurement and real-time wafer mapping. VARIAN 3190 is a process-centric machine that provides users with flexibility and high accuracy. The ergonomically-designed interface simplifies and accelerates the operation of the tool. The asset is also highly customizable, allowing users to define standard operating procedures for specific processes. Additionally, all parameters are stored and can be quickly recalled for future use. Overall, 3190 is an ideal platform for the deposition of high precision thin films on a variety of substrates. The unit is highly reliable, efficient, and cost-effective. With its advanced design and wide range of features, VARIAN 3190 is an excellent choice for a variety of thin film applications.
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