Used VARIAN 3190 #9112440 for sale

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Manufacturer
VARIAN
Model
3190
ID: 9112440
Vintage: 1992
Sputtering system 1992 vintage.
VARIAN 3190 is a high-performance sputtering equipment that is designed to provide an ultra-clean, high-efficiency, and highly controllable deposition of precise test films at any production rate. It utilizes three sources of sputterable material for superior substrate coverage and high deposition rates. The system is designed around a low-energy, fast pulsing discharge driven by a three-phase, power supply. This configuration allows extremely uniform deposition of material across the substrate surface and very rapid sputter times, significantly increasing deposition rates while producing cleaner surfaces than expected with alternative systems. 3190 has a fully configurable interface, allowing for the precise control of evaporation rates, film thickness, temperature, pressure, pulsing frequencies, and other parameters. Its modular construction is designed for easy unit integration and fast tool changeover. It can also be integrated with existing legacy controller designs. VARIAN 3190 features full process automation with thermal management and uniform deposition across multiple targets. It also offers optional sputter sources to provide custom film combinations such as conductive, semi-conductive, and protective film layers. 3190 has a large target selection including magnetic disks, copper alloy targets, and ultra-fine metal targets. As a result, the machine can be optimized for the desired material composition as well as production rates. Its proprietary plating technology improves uniformity and reduces cost by reducing losses due to over-pumping. The tool is also well-suited for producing dielectric and optical coatings, such as metal oxides and nitrides. VARIAN 3190 is suitable for applications requiring superior film uniformity, high rate of deposition, ultra-high purity, and excellent surface quality. Its multi-functional design provides maximum cost savings and flexibility to meet any production requirement and its machined components ensure consistent performance and reliability. 3190 is the ideal solution for a wide range of sputtering needs in a variety of applications, from high-precision research projects to large-scale commercial operations.
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