Used VARIAN 3190 #9184623 for sale

This VARIAN 3190 has been sold.

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ID#: 9184623

Manufacturer:

VARIAN

Model:

3190

Wafer Size:

5"

Equipment Details:

Sputtering system, 5"
Module: Metal
Process: Metal deposition
Front-metal (RF +Al +Al +Al).
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