Used VARIAN 3290 STQ #9154639 for sale
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ID: 9154639
Sputtering system, 6"
Entity target configuration:
Process station #2: ALSICU
Process station #3: ALSICU
Process station #4: ALSICU
Process station cathode configuration:
Station #2:Quantum (Rotating magnet)
Station #3:Quantum (Rotating magnet)
Station #4:Quantum (Rotating magnet)
Heater configuration:
Heater type (All station): DC BIAS
Heater controller (AII station): Eurotherm 808 x 3
Power supply configuration:
Outer PSU station #2: AE PINNACLE 12 KW
Outer PSU station #3: AE PINNACLE 12 KW
Outer PSU station #4: AE PINNACLE 12 KW
System vacuum configuration:
Compressor: Model 8600
8R Cryo pump: Yes
Water pump: No
Software configuration:
User's guide: ECS 3000
Version: 96.204.10U1
Floppy drive: 3.5"
Double cassette loading.
VARIAN 3290 STQ sputtering equipment is a three-target, two-kit simultaneous reactive and non-reactive magnetron sputtering system developed by VARIAN for the deposition of high-quality films. It is designed for use in a variety of applications ranging from high-end scientific research to industrial production, and is the preferred choice for many laboratories for its ease of use and reliability. VARIAN 3290STQ sputtering unit is equipped with a rotatable, electromechanically-controlled turret sputtering head designed to provide highly accurate control of target angles and substrate-processing distances for optimal sputter deposition. It features a 24-target, 3-position turret sputtering head with non-magnetic, titanium-based electrically conductive targets. The target and workpiece positioning is precise to 0.1mm accuracy due to the electrically-controlled rotary arm. In addition, the machine is designed to perform reactive and non-reactive sputtering of metals, semiconductor materials, and alloys in order to achieve target geometric and physical properties. The tool is equipped with a patented two-kit magnetron for reactive sputtering of compound materials, allowing for unmatched precision and repeatability for compound and alloy targets. 3290 STQ sputtering asset is designed for reliable and efficient sputter coating operations, and is capable of processing up to ten substrates simultaneously with minimal headache. The model utilizes a multi-station design allowing easy substrate changing while remaining safe and secure. It features a motorized guide rail, automatic substrate transport, and movement monitoring equipment for precise die position control and film uniformity. The system is also equipped with a patent pending pilot kit which is a closed-loop chamber pressure feedback unit that ensures optimized process parameters in a safe and secure manner. 3290STQ sputtering machine also features an intuitive, graphical user interface for easy setup, programming, and monitoring of the operation. VARIAN 3290 STQ sputtering tool is designed to offer a reliable and efficient platform for high-quality film deposition and is the perfect choice for many laboratories worldwide. With its advanced engineering, precise control, and intuitive user interface it is sure to provide excellent results.
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