Used VARIAN 3290 #9094690 for sale

VARIAN 3290 is a compact, fully automated sputtering equipment developed by VARIAN Semiconductor Equipment Associates, Inc. 3290 is capable of sputter-coating substrates with a wide range of materials and can be used to deposit metals, oxides, alloys, and other compounds. The system offers versatile sputtering configurations that can be adapted to meet various deposition performance requirements. VARIAN 3290 is a single-chamber unit with an integrated loadlock. The interior of the chamber is constructed from stainless steel and is plumbed for up to four separate sputter sources. The chamber includes an e-match machine for controlling process gas flow. The tool also includes features such as a pre-sputtering substrate cleaner and a robot-controlled rotating substrate carousel. 3290 is equipped with a range of advanced control and monitoring features. These features allow the user to easily adjust process parameters such as pressure, sputtering pressure, process time, power, voltage, current, and distance between the substrate and the sputter source. Additionally, a VES2-compatible computer interface is available for remotely controlling the asset. The monitoring features of VARIAN 3290 can be used to ensure quality results in every process step. The model includes a built-in particle counter, a linear variable differential transformer (LVDT), a quartz crystal microbalance (QCM), and optical monitoring ports. The QCM in particular can be used to measure Adsorption-Desorption Isotherms and quantitative surfaces quality evaluation. 3290 offers a wide range of sputtering applications. It is ideal for high throughput sputtering, such as sputter coating solar cells, HFETs, FETs, MEMS, nanowires, nanoparticles, and thin film transistors. The equipment also allows for the sputter deposition of insulating, conductive, and semiconductive materials. VARIAN 3290 is an effective and versatile sputtering system. With its advanced control and monitoring features, it is the ideal unit for achieving high-quality coating results. Whether users need to deposit metal, oxides, alloys, or other compounds - 3290 offers the perfect sputtering solution.