Used VARIAN 3290 #9240545 for sale

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VARIAN 3290
Sold
Manufacturer
VARIAN
Model
3290
ID: 9240545
Wafer Size: 6"
Sputtering system, 6" FLUKE 1722 Controller Station 1: Etch Station 2, 3, 4: TPI Target assy.
VARIAN 3290 is a high-vacuum sputtering equipment that employs a unique cathodic-arc magnetron to sputter deposit materials onto substrates or components. It is a versatile tool used for coating small parts and for prototyping new materials or processes. This sputtering system is composed of multiple isolated high-vacuum chambers, and features an intuitive graphical user interface for easy operation. In the primary chamber of 3290, the gas is evacuated by a turbomolecular pump coupled with a cryopump, and the chamber is heated by a high-efficiency quartz-halogen lamp to enable better film adhesion and even deposition. The chamber also has a rotating quartz tube, which allows for rapid substrate rotation and excellent uniformity. The cathodic-arc magnetron utilised in this unit produces an arc generated by an electrical current, which is then used to sputter target materials from the anode. The advanced magnetron control unit provides versatile and precise power for optimal film quality and deposition rate. The secondary chamber contains a ceramic vacuum chamber that can be loaded with a substrate for any deposition process. The chamber comprises multiple layers of vacuum insulation which can withstand extreme temperatures, allowing for multi-layer deposition and precise etching on the substrate. In addition, it also contains a sink mounted in the chamber floor, to collect and remove sputtered material. An automated control machine allows VARIAN 3290 to be operated remotely, with a variety of options for operation, including tool wide settings, and deposition parameters. The asset also features multiple vacuum valves and bellows, to maintain the pressure in each chamber. In addition, 3290 features an ion bombardment model, which helps optimize the adhesion of deposited layers by magnetically accelerating the ions in the low-pressure chamber, preventing them from coming into contact with the substrate. The equipment also comes equipped with an optical metrology system, to measure the exact thickness of the deposited layers. Overall, VARIAN 3290 sputtering unit is an ideal choice for coating small parts and prototype development. Its unique cathodic-arc magnetron, coupled with an automated control machine, multiple vacuum chambers and valves, and a versatile ion bombardment tool, allows for precise materials deposition with excellent adhesion and uniformity.
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