Used VARIAN / NOVELLUS M2i #9106398 for sale

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ID: 9106398
Wafer Size: 6"
Sputtering system, 6" (1) Etch target (4) Sputtering targets A2- Etch w/ Comdel CPS1001 RF power supply A3- Cobalt w/ Varian Multi Range DC Power Supply 3-12kW A4 - Ti/TTN w/Varian Multi Range DC Power Supply 6-24kW A5 - Al w/ Varian Multi Range DC Power Supply 3-12kW A6 -Ti/TTN w/Varian Multi Range DC Power Supply 3-12kW (4) CTI Cryogenics 9600 Compressors Neslab Coolflow System IV 230V 3 phase Infincon CIS TS100 RGA units on A2-A6 and transfer Missing sputtering target assemblies ACE Version Quantum targets Degas modules 1995 vintage.
VARIAN / NOVELLUS M2i is a high-end sputtering equipment that offers robust performance for high-production, thick-film deposition applications. VARIAN M2i is capable of depositing a wide range of films including conductors, dielectrics, and metal oxides. It is designed for high-volume production and its low cost of ownership make it an attractive choice for those looking to add sputtering capabilities to their laboratory or production facility. NOVELLUS M2i is equipped with a 2-inch magnetron sputtering system that allows for both shallow and deep approaches to the deposition process. It features a single source unit with dual outputs, offering up to 6 kW of power available for film deposition. The source is designed to provide a consistent level of deposition, even when the deposition environment changes. The machine is also engineered for high deposition rates, providing an approximate 16-20 nm/min rate. M2i is capable of producing thick film layers with precise control over the topography, coverage, and uniformity of the films. It is exceedingly reliable and the tool's software is designed to allow for easy operation and maintenance. The asset can be operated in either manual or automatic modes, providing a high degree of flexibility for the user. Additionally, VARIAN / NOVELLUS M2i is equipped with an emergency generator to protect materials from any unforeseen events. VARIAN M2i is an invaluable tool for those looking to produce thick film layers with reliable, repeatable results. Its robust performance combined with its low cost of ownership make NOVELLUS M2i an incredibly attractive option for any laboratory or production facility.
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