Used STRASBAUGH 6DE-1 #135707 for sale

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ID: 135707
Wafer Size: 12"
Vintage: 1982
Overarm polishing machine, 12" Wafer polishing single table: (3)x2", (3)x3", 4", 5" Multiple small wax-blocked wafer R&D Polishing Stainless steel precision, 12" Lapped flat CMP platen (Pad process table) Mounted with adaptor hub 1982 vintage.
STRASBAUGH 6DE-1 is a multi-functional process equipment designed for grinding, lapping, and polishing (GL&P) applications. This system is suitable for use in production as well as Research and Development (R&D) labs and is capable of handling a wide variety of substrates from 4 inch or 100mm to 6 inch or 150mm. 6DE-1 unit comes with the addition of interchangeable modular base and chucks that allow for the mounting of additional accessories for a range of GL&P processes. The machine can also be interfaced with a computer for real-time process control, continuous monitoring, and data collection. STRASBAUGH 6DE-1 has four drive motors for wafer movement: a DC brushless torque motor for polishing, a brushless linear servo for automised movement of the wafer, a biaxial orientation motor to allow for the adjustment of wafer's position, and a powerful AC motor for lapping and grinding. This tool also has a pneumatic chuck, adjustable lapping platens, and selectable downforce control. 6DE-1 also features a wide variety of standard accessories, as well as custom accessories which allow for process variation and increased flexibility. These accessories include holders, pads, platens, water jets, and tooling components. This asset is easy to operate and maintain. Operating costs are minimized due to the user friendly interface, low operational power costs, and minimal cleaning needed. It is also economically advantageous as it includes additional accessories such as the platens, pneumatic chuck, and downforce control. STRASBAUGH 6DE-1 is perfect for a wide variety of production and R&D uses due to its diverse capabilities and low cost of ownership. It can help improve yield, process repeatability, cost control, and environmental compliance. Its modular model and customizable platform allows for it to meet customer needs. This equipment is fast and effective, and its DC brushless torque motor for polishing produce flat, smooth surfaces for even the most difficult materials. Finally, its powerful AC motor optimizes lapping and grinding operations and ensures consistent surface finish. With 6DE-1, users can achieve an increase in throughput without sacrificing quality.
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