Used BROOKS AUTOMATION / JENOPTIK Ergospeed II #9175351 for sale

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ID: 9175351
Vintage: 2000
SMIF Loader system SLR 200 LPTSM/L 2000 vintage.
BROOKS AUTOMATION / JENOPTIK Ergospeed II wafer handler is a multifunctional robotic equipment providing fully automated wafer transfer, handling, and protection. The high-precision mechanics and control system provide reliable and precise operation, delivering samples from/to process chambers with ultimate level of accuracy. Additionally, the customizable programmable logic controller (PLC) ensures smooth operation and flexibility for complex automation and process workflows. JENOPTIK Ergospeed II wafer handler includes a fully automated wafer handling mechanism which is able to load and unload wafers from/to the process chamber, as well as secure storage for the wafers. The handler is equipped with an Intelligent Vision Unit (IVS) with a user friendly software package. This software automatically aligns the wafers and verifies the integrity of the wafer surface. Additionally, the software enables users to audit each wafer's performance and confirm whether it is suitable for use within a larger machine. BROOKS AUTOMATION Ergospeed II utilizes a range of advanced technologies to maximize workflow efficiency. Its proprietary wet cleaning technology ensures wafers are always clean before they are loaded into the process chamber. Its advanced air bearing technology ensures reliable operation and accuracy, while the powerful engine guarantees precise and smooth motion of the wafer handling tool. Ergospeed II is also equipped with numerous safety features, including anti-collision, electronic interlocks, and vibration protection. These features are designed to ensure the safe transfer of wafers, preventing injury to personnel and further damaging the processed wafers. BROOKS AUTOMATION / JENOPTIK Ergospeed II is an essential component of any production line, providing highly reliable and efficient wafer handling, and protection. Its advanced technology and safety features guarantee accuracy in every operation, resulting in superior quality for each wafer.
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