Used BROOKS AUTOMATION / JENOPTIK Ergospeed II #9280737 for sale

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BROOKS AUTOMATION / JENOPTIK Ergospeed II
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ID: 9280737
SMIF Loading system SLR 200 LPTSM/L.
BROOKS AUTOMATION / JENOPTIK Ergospeed II is a high speed wafer handler designed to automate wafer processing applications. It is compatible with industry standard wafer sizes ranging from 100 mm to 300 mm in diameter, allowing for a wide range of applications. JENOPTIK Ergospeed II makes use of advanced motor technology to ensure precise and consistent wafer handling, resulting in minimized processing time and improved yields. BROOKS AUTOMATION Ergospeed II is specifically designed to meet the requirements of wafer loading and unloading systems. The load port is designed to support single-sided wafer loading, as well as allowing for dual-sided wafer loading or unloading. It also features a wide range of in-process vision inspection capabilities, such as infrared and ultraviolet imaging, as well as object recognition. Additionally, automated alignment and alignment corrections can be achieved using the onboard vision equipment. Ergospeed II features an integrated wafer orientation system, allowing for accurate placement of wafers in the unit. The machine utilizes two perpendicular camera systems to generate a 360-degree image of the wafer, allowing for wafer recognition and further wafer processing. Additionally, a wafer alignment tool enables accurate mounting of the wafer into the processing chamber. BROOKS AUTOMATION / JENOPTIK Ergospeed II is equipped with integrated high-performance drive motors, offering precise motion control and flexibility. The asset is designed for high-speed operation and can provide rapid and consistent wafer handling with a maximum speed of up to 200 mm/s. The high-resolution, dynamic drive model also provides smooth motion while controlling jitter and vibration. In terms of safety, JENOPTIK Ergospeed II includes a range of safety features to protect wafer operators from accidental contact with the machine. These features include an interlock equipment during equipment operation, as well as a safety cover to guard against accidental contact. Additionally, an emergency stop system is also included. Overall, BROOKS AUTOMATION Ergospeed II is a highly advanced wafer handler designed to automate wafer processing applications. Its sophisticated motor technology ensures precise and consistent wafer handling with a maximum speed of up to 200 mm/s. The integrated safety features further ensure protection to wafer operators. With its extensive capabilities, the unit is an ideal choice for high-speed wafer processing.
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