Used BROOKS AUTOMATION / JENOPTIK SLR 200 #9129244 for sale

BROOKS AUTOMATION / JENOPTIK SLR 200 Wafer Handler is an automated robotic equipment designed for the loading and unloading of wafers in semiconductor manufacturing applications. This system provides accurate handling of wafers in a sterile environment. JENOPTIK SLR 200 is equipped with a Electrostatic Discharge (ESD) protection unit, which prevents damage to the wafers due to electrostatic charges. With an efficient actuator, wafers can be moved out of the tool 2-3 times faster than manual loading and unloading. The machine is capable of reaching a peak speed of 1820 mm/s and can handle wafers ranging in size from 100µm to 200 mm. It offers a wide range of capabilities, including a mapping tool that allows for fast programming, and the ability to handle up to 50 wafers per minute. The tool is designed to increase productivity, with an integrated vision asset that is capable of identifying all wafer types and sizes in a single cycle. The model also provides a high level of accuracy of wafer placement, with repeatability of 0.2mm. BROOKS AUTOMATION SLR 200 can also be used in conjunction with other loader/unloaders and vacuum robots, for increased throughput. In addition, the equipment provides a variety of safety features, including an emergency stop button and infrared sensors. This ensures that the wafers are handled in a safe and secure manner. The system also includes an intuitive user interface, allowing for easy operation and programming. Overall, SLR 200 Wafer Handler is an efficient and reliable platform for the loading and unloading of wafers in semiconductor manufacturing applications. With its ability to handle a wide range of wafer sizes, accurate placement, and fast speeds, this unit is ideal for increased productivity and automation.