Used BROOKS AUTOMATION MTX 4000 #9194301 for sale

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BROOKS AUTOMATION MTX 4000
Sold
ID: 9194301
Wafer Size: 12"
Vintage: 2004
Wafer sorter, 12" 2004 vintage.
BROOKS AUTOMATION MTX 4000 Wafer Handler is an automated wafer handling equipment that is designed to move semiconductor wafers and accurately place them into processing tools. It is well-suited for applications such as wafer transport, wafer loading as well as test wafer handling, coating and unsealing, probing, and die pick and place.MTX 4000 is equipped with advanced sensors and manipulators to accurately transport and place wafers into processing tools, as well as to assess the wafer geometry for quality assurance purposes. The wafer manipulator is designed to actuate the wafer, while the gripping force and wafer location are synchronized and controlled. BROOKS AUTOMATION MTX 4000 is powered by a PLC-based logic control system that permanently monitors and controls the position of the wafer as it travels along its path. This unit is used to make precision adjustments for the wafer's temperature and position as it moves it towards and away from the carrier. The control machine also has dual redundant air valves to ensure that the pressure is even and consistent throughout the tool. MTX 4000 also includes several safety features, such as adjustable emergency shutoff valves and a full asset interlock. BROOKS AUTOMATION MTX 4000 also has the ability to interface to other related hardware and software in order to integrate the model. This includes the use of FOUP handling mechanisms, load ports and cassette manipulators. OEM interface boards provide the connection between MTX 4000 and other systems and allow users to send data such as wafer recipes, coordinate signals, and send/receive other control signals. BROOKS AUTOMATION MTX 4000 comes with several additional features, such as a color touchscreen terminal, multi-level password protection, and multiple language support. It also supports environmental monitoring, utilizing features such as a built-in air filter, pressure transducers, and thermal monitoring. MTX 4000 can be configured and customized for different sized wafers and the equipment can be operated in either manual or automated modes. Overall, BROOKS AUTOMATION MTX 4000 Wafer Handler is an efficient and reliable wafer-handling system with advanced sensor and control systems to ensure accuracy and safety. Its wide range of features, flexibility, and integration capabilities make it an ideal choice for wafer-processing applications in the semiconductor industry.
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