Used RORZE FORS-300 #9215992 for sale

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Manufacturer
RORZE
Model
FORS-300
ID: 9215992
Wafer Size: 8"-12"
Wafer sorter, 8"-12" (2) RAF-01013 Loadport EFEM Options: Single-arm, clean robot RR716L1523-3A6-001 RA410 Wafer aligner and orienter Alumina ceramic end effector, paddle-shaped: 2.3 mm Thick ADVANTECH PC With UNI-WIRE DI/O interface (2) Serial ports Ethernet interface and RS-232 communication to EFEM PC PATLITE SEFB-402D-RAGB Signal tower Ionizer Interior service lighting: 25 ft Candles per square foot (Minimum) Wafer presence detector: SUNX EX-13EA, Throughbeam, LED sensor (2) RORZE SEMI Loadports Throughput: > 150 Wafers per hours & Loadport cycle time with single-arm robot Reliability: MCBF >100,000 Cycles MTTR: 2 Hours (With spare parts) Mini-environment cleanliness: ISO Class 1 at 0.1 microns per ISO-14644-1 Wafer placement repeatability: +/-0.100mm in X & Y Direction, 3 sigma, +/-0.25° notch orientation, 3 sigma Safety devices and interlocks: EMO Switch Cover interlocks Utilities: Operating and storage ambient temperature: 20°C to 30°C (Non-condensing) Vacuum: -67 kPa to –93 kPa at 30 lpm System vacuum: –65kPa Connecter: ¼" Tube Pressurized air: 600kPa to 700kPa at 20 lpm Interface connections: LPU-1 COM: RS-232 Communication with left loadport LPU-2 COM: RS-232 Communication with right loadport HOST COM: RS-232 Communication with host EFEM PC IO LT TOWER: Full control of light tower Ethernet: Robot controller and EFEM PC VS 1: View screen VGA signal for control by host PC VS 2 EMO Out Keyboard Mouse PC VS Vacuum Sensor: Full control of protrusion sensor RS-232 Control of touch screen monitor PC Keyboard: PS/2 Keyboard connector to EFEM PC Compressor air Electrical power: 120V AC, ±10% at 23A (Maximum), 50/60Hz Power connector: Amphenol 97-3102A-20-3P.
RORZE FORS-300 is a high-precision wafer handler designed to handle small and large wafers up to 300mm diameter. It is an essential tool for semiconductor and microelectronics manufacturing industries as it enables operators to handle delicate components with maximum accuracy and repeatability. FORS-300 is designed to increase yield and provide maximum performance with its variable and fast transport drive equipment. The transport system features a dual-drive unit and precision linear bearings that provide smooth and precise motion to reduce errors and improve throughput. It has an integrated optical machine that ensures handle component placement is accurate with a repeatability of up to +/- 0.03mm. The control tool provides real-time monitoring and feedback, and alarm functions to alert the operator in case of any issue. RORZE FORS-300 is designed for flexibility and ease-of-use with its compact size and light-weight. Its upgradability and scalability features make it ideal for increasing production capacity. The asset is user friendly, with an intuitive user interface and high-speed motion control. It also features programmable features and customizable settings for optimized operation. It comes with a variety of peripheral options such as a vision model, robotic arm, and a laser equipment, allowing it to be integrated into larger automated lines. FORS-300 includes a reliable and efficient power system that delivers stable voltage and frequency control, reducing power consumption and the noise levels. It also comes with optional force and torque monitoring systems that allow for accurate measurements of the physical forces applied to the component during handling. Finally, RORZE FORS-300 is backed by a warranty and technical support team dedicated to ensuring the best performance for users. This support is available for installation, operation, troubleshooting, maintenance, and other requirements.
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