Used RORZE FORS-300 #9215992 for sale
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ID: 9215992
Wafer Size: 8"-12"
Wafer sorter, 8"-12"
(2) RAF-01013 Loadport EFEM
Options:
Single-arm, clean robot RR716L1523-3A6-001
RA410 Wafer aligner and orienter
Alumina ceramic end effector, paddle-shaped: 2.3 mm Thick
ADVANTECH PC With UNI-WIRE DI/O interface
(2) Serial ports
Ethernet interface and RS-232 communication to EFEM PC
PATLITE SEFB-402D-RAGB Signal tower
Ionizer
Interior service lighting: 25 ft Candles per square foot (Minimum)
Wafer presence detector: SUNX EX-13EA, Throughbeam, LED sensor
(2) RORZE SEMI Loadports
Throughput: > 150 Wafers per hours & Loadport cycle time with single-arm robot
Reliability: MCBF >100,000 Cycles
MTTR: 2 Hours (With spare parts)
Mini-environment cleanliness: ISO Class 1 at 0.1 microns per ISO-14644-1
Wafer placement repeatability:
+/-0.100mm in X & Y Direction, 3 sigma, +/-0.25° notch orientation, 3 sigma
Safety devices and interlocks:
EMO Switch
Cover interlocks
Utilities:
Operating and storage ambient temperature: 20°C to 30°C (Non-condensing)
Vacuum: -67 kPa to –93 kPa at 30 lpm
System vacuum: –65kPa
Connecter: ¼" Tube
Pressurized air: 600kPa to 700kPa at 20 lpm
Interface connections:
LPU-1 COM: RS-232 Communication with left loadport
LPU-2 COM: RS-232 Communication with right loadport
HOST COM: RS-232 Communication with host
EFEM PC IO
LT TOWER: Full control of light tower
Ethernet: Robot controller and EFEM PC
VS 1: View screen VGA signal for control by host PC
VS 2
EMO Out
Keyboard
Mouse
PC VS
Vacuum
Sensor: Full control of protrusion sensor
RS-232 Control of touch screen monitor
PC Keyboard: PS/2 Keyboard connector to EFEM PC
Compressor air
Electrical power: 120V AC, ±10% at 23A (Maximum), 50/60Hz
Power connector: Amphenol 97-3102A-20-3P.
RORZE FORS-300 is a high-precision wafer handler designed to handle small and large wafers up to 300mm diameter. It is an essential tool for semiconductor and microelectronics manufacturing industries as it enables operators to handle delicate components with maximum accuracy and repeatability. FORS-300 is designed to increase yield and provide maximum performance with its variable and fast transport drive equipment. The transport system features a dual-drive unit and precision linear bearings that provide smooth and precise motion to reduce errors and improve throughput. It has an integrated optical machine that ensures handle component placement is accurate with a repeatability of up to +/- 0.03mm. The control tool provides real-time monitoring and feedback, and alarm functions to alert the operator in case of any issue. RORZE FORS-300 is designed for flexibility and ease-of-use with its compact size and light-weight. Its upgradability and scalability features make it ideal for increasing production capacity. The asset is user friendly, with an intuitive user interface and high-speed motion control. It also features programmable features and customizable settings for optimized operation. It comes with a variety of peripheral options such as a vision model, robotic arm, and a laser equipment, allowing it to be integrated into larger automated lines. FORS-300 includes a reliable and efficient power system that delivers stable voltage and frequency control, reducing power consumption and the noise levels. It also comes with optional force and torque monitoring systems that allow for accurate measurements of the physical forces applied to the component during handling. Finally, RORZE FORS-300 is backed by a warranty and technical support team dedicated to ensuring the best performance for users. This support is available for installation, operation, troubleshooting, maintenance, and other requirements.
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