Used RUDOLPH / AUGUST SWS #9235595 for sale

RUDOLPH / AUGUST SWS (Substrate Wafer Equipment), manufactured by AUGUST Technologies, is a wafer handler designed for manual as well as automated processes. It is composed of two automatic slit-opening robots, a double-width wafer loader, one transfer robot and an unload station equipped with a chamber. The double-width wafer loader of AUGUST SWS is designed to accommodate large-sized wafers with widths of up to two inches. The loader can handle both 4, 5 or 6-inch wafers and is provided with a modular indexing mechanism for reliable feeding. The transfer robot used in the system consists of two linear loaded arms, which facilitate a continuous feeding of the wafers into SPECTRO or any other processing machine. The transfer robot has been equipped with a safety device that prevents wafer damage during transfers. The two automatic slit-opening robots are useful in loading slits of uniform size and quality on the wafers. They have been designed to capture slits of various widths and slits of depths up to 0.05 inch, while maintaining wafer integrity. Each robot is provided with a variable output drive and a safety interlock that limits the duration of the wafer unlock procedure. The unit is also provided with a chamber, which is suitable for loading and unloading wafers between the processing machines. This chamber features adjustable parameters and is effective in preventing contamination. In conclusion, RUDOLPH SWS is a wafer handler designed for both manual and automated processes. It features a double-width wafer loader, two automatic slit-opening robots, a transfer robot as well as a chamber suitable for loading and unloading wafers between the processing machines. These components combine to create a reliable and efficient wafer handling machine capable of providing uniformity with slits of the highest quality.