Used NIKON NSR 1505 i7A #9409898 for sale

Name: NIKON NSR 1505 i7A
Brand: NIKON
SKU: 9409898
Availability: InStock

URL successfully copied!

Tap to zoom

Wafer Steppers

Manufacturer

NIKON

Model

NSR 1505 i7A

ID: 9409898

Vintage: 2010

Stepper Lens data Field size: 15 x 15 mm Lamp uniformity: < 2% Flash power: 300 Mw Exposure stability: ≤ 1.4% Water flatness: ≤ 25µm LSA Focus: < 1.5 µm Tele focus: < 0.02 µm Reticle blinds: 0.4 - 0.8 µm Stepping: Sigma < 0.03 µm Orthagonality: < 0.2 sec Reticle rotation: RRep ≤ 0.02 µm Wafer loader repeatability: Sigma ≤ 5 µm Overlay: 3 σ with average ≤ 0.13 µm Focus repeatability: 3-1 ≤ 0.15 µm Lens tilt: UR - LL ≤ 0.45 µm UL - LR ≤ 0.45 µm 2010 vintage.

Read More Close

NIKON NSR 1505 i7A Wafer Stepper is a high-precision, compact lithography equipment designed for advanced semiconductor device manufacturing. It utilizes a 7-nanometer resolution step/scan technology with a highly reliable stepper/scanning head and features a large working field size of 420mm x 500mm. This machine's ability to span a large working field without reducing resolution gives it a unique advantage in modern nanotechnology applications. The optical architecture of NIKON NSR-1505I7A Wafer Stepper is based on a simple and effective design. The system is constructed of an ultra-high resolution optical lens and low NA projection optics. This combination results in an image field of 420mm x 500mm and a highest resolution of 7nm, precisely controlling the displacement of an object to achieve a constant step size. Both variations of static and scanning head applications of the wafer stepper are supported, allowing for flexibility in production. NSR 1505 I7A Wafer Stepper comes with a proven track record for performance and accuracy. It has advanced motion control technology with 6-axis motion control and simplified positioning, guaranteeing a higher accuracy and precision of process. This machine is also equipped with an ergonomic and user-friendly set of software, making it easy to operate. NSR 1505 i7A Wafer Stepper uses a range of advanced features, including a self-learning algorithm, to maximize the efficiency of photolithographic exposures. The unit is capable of achieving higher resolution imaging and improved pupil polarization, allowing users to obtain even clearer images and subsurface imaging. The machine also features automated alignment, enabling rapid integration into production lines. NSR 1505 I 7 A Wafer Stepper is a highly reliable and efficient machine, enabling users to achieve high-precision lithography on a wide variety of substrates. Its compact size allows for easy installation into existing production lines, with minimal setup time. The advantages of this machine, coupled with its intuitive and user-friendly software, makes it an ideal choice for advanced semiconductor device manufacturing.