Used NIKON NSR 2005 i11C #9309536 for sale

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Manufacturer
NIKON
Model
NSR 2005 i11C
ID: 9309536
Stepper.
NIKON NSR 2005 i11C is a wafer stepper equipment designed for a wide range of applications, such as back-end semiconductor processing, fine-pitch die attachment, and thin film development. It is designed to meet the rigorous requirements of medium- to large-scale production, and it incorporates advanced technologies for precision patterning, stable alignment, and accurate overlay. NIKON NSR 2005 I 11 C's high resolution imaging system uses an advanced NIKON patented homogenized reverse-illuminated 5" (127 mm) slit imaging lens and a high-sensitivity digital CCD sensor, which offers high imaging accuracy and dynamic range. The unit also includes downstream optics and structures to provide precise control over the imaging plane. NSR 2005 i11C is equipped with an automated stage positioning machine that utilizes two-axis alignment measurement and interferometric optics with a four-level test structure for accurate alignment and overlay. The stage also includes a high-resolution encoder, providing precise rotational control for accurate movements, and it supports both continuous and local scan patterns. In terms of mask-to-wafer registration, NSR 2005 I 11 C incorporates both global and local registration methods, coupled with best-in-class alignment and overlay measurement. The tool is also capable of recognizing imperfections in the substrate surface, such as warpage and non-uniformity, and provides best-in-class compensation and correction. NIKON NSR 2005 i11C utilizes a multilayer TMCS (Total Maskless Control Asset) algorithm, which enables precise patterning of highly complex, multi-level structures. This model provides high-speed pattern generation, with an area coverage rate of up to 10x faster than conventional step-and-repeat systems. The equipment is also equipped with advanced wafer monitoring and process control features to ensure repeatable, reproducible results. The RFID-enabled data logging and traceability system allows for secure data transfer between production sites, and process tracking in tablet PCs. TheNIKON NIKON NSR 2005 I 11 C is a powerful, versatile wafer stepper unit that offers highly precise patterning and excellent overlay control for a wide range of production applications. With its advanced optics, multilayer algorithm, automated stage positioning machine, and robust process controls, NSR 2005 i11C is a reliable platform for high-volume production.
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