Used NIKON NSR 2005 i8A #293617129 for sale
It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.
Tap to zoom
Sold
ID: 293617129
Wafer Size: 8"
Vintage: 1992
Stepper, 8"
Laser Model: < 1mW He-Ne laser
(5) Reticles: 6” x 6”
Lamp power supply
(2) CCU NVC6B-U Black and white cameras
Computer
Monitor: Black and white
HBO Lamp: 2000 W
Stage:
Stage axis: X, Y, Z
Automated Stage
Vacuum
Short circuit interrupting capacity: 22 KA
Compressed air
Chemical: Freon-22
Suniso 3GS Refrigeration Oil
Non-contact cooling water
Motor / load: 12 A
Power supply: 208 V, 40 A, 50/60 Hz, 3 Phase
1992 vintage.
NIKON NSR 2005 i8A is a wafer stepper, a machine used for scaling the production of semiconductor devices in the electronics industry. It operates by transferring energy from a laser diode or from a focused ion beam (FIB) to achieve the desired pattern on a substrate. NIKON NSR 2005I8A is designed to reduce cost and improve productivity in the semiconductor mass production process. NSR-2005I8A is equipped with an integrated illumination, which reduces the exposure time of each exposure. This short exposure reduces the effect of power supply variations as well as particles and contamination, allowing for greater process stability. Further, its acceleration/decceleration time has been reduced to 7 ms, which minimizes non-optimal exposure time in order to maximize production throughput and reduce any potential damage or resources from exposure time. Furthermore, it features a large print field, allowing for the production of larger dies with higher resolution and fewer defects. NSR 2005I8A offers enhanced stability with a laser power stability of ±0.1%, allowing for improved and consistent results. Its stitch-bond mismatch control, meanwhile, achieves a low stitching distortion by monitoring the stitching direction, minimizing distortion in fine pattern stitching. Its exposure control system further enables surface roughness and image quality control. The machine is further equipped with a software feature that enables correction at exposure and diagnostics after exposure to ensure defect-free product quality. NSR-2005 I8A also features auto focus alignment and advanced auto focus algorithms, capable of rapidly performs auto-focus due to its low aberration projection optic. Its cell-by-cell assess technique further improves the productivity and yield at mass production level. It also features a three-dimensional alignment function, which can correct any critical dimension errors, while its integrated general-purpose I/O port simplifies processes such as operation data communication and process management. Overall, NSR 2005 i8A is a powerful wafer stepper, capable of producing consistent, high-quality results in the mass production of semiconductor devices. Its advanced features and technologies enable it to perform rapid exposure, with minimal exposure time and better stability, ensuring a higher quality product and improved productivity in the process.
There are no reviews yet