Used NIKON NSR 2205 EX12B #293589625 for sale

NIKON NSR 2205 EX12B
Manufacturer
NIKON
Model
NSR 2205 EX12B
ID: 293589625
Stepper Missing parts.
NIKON NSR 2205 EX12B is an advanced stepper model specifically designed to be used in high precision wafer processing. It provides several advantages over traditional steppers, such as higher throughput, improved accuracy, and reduced maintenance requirements. NIKON NSR-2205EX12B features a powerful two-level motorized Z-axis drive equipment that provides smooth operation and allows for precise stage movement. The first level drive system is supported by manually adjustable shunts. The second level drive unit includes a built-in resolver that provides low-noise and low-vibration operation even at high speeds. This allows for accurate and repeatable scans over large areas of the wafer without drift. The stepper also features a Field Emission Scanning Electron Microscope (FESEM) with an integrated CCD camera. This enables higher resolution imaging of sample surfaces, allowing for more accurate detection of subtle anomalies. The FESEM can also be used for in-situ manipulation of structures on the wafer surface. This is useful for removing residues, adjusting exposure parameters, and controlling processing conditions during exposure. In addition, the stepper includes an exposure registration mechanism for high-precision wafer alignment. This allows for highly accurate registration of wafer patterns and is capable of quickly compensating for local fiducial misalignment. This machine also features an integrated auto-calibration routine that quickly adjusts the focus to ensure proper alignment. The stepper also includes an automated stage alignment function, which corrects for any misalignments during exposure. NSR-2205 EX12B is an advanced stepper designed to improve throughput, accuracy, and maintenance requirements for wafer processing. It uses a powerful dual-level drive tool for smooth motion without drift and FESEM for high-resolution imaging and in-situ manipulation of wafer patterns. In addition, the stepper includes auto-calibration and automatic stage alignment functions to ensure accuracy and repeatability. All of these features make NSR 2205EX 12B an ideal choice for those looking for a highly precise and reliable wafer stepper.
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