Used NIKON NSR 2205 EX12B #9379641 for sale
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NIKON NSR 2205 EX12B is a state-of-the-art wafer stepper used by semiconductor manufacturers. It features a unique unified indexing equipment, bi-directional alignment, and advanced ultra-precision control. The EX12B is built to meet the needs of the most demanding device fabrication applications. The system uses a versatile method of wafer transport based on a designed carrier that simplifies wafer exchange, storage and automated tool control. This unified indexing unit enables the capability to accurately position the wafer at an exact location to a resolution of one micron over a range of positions. This enables the optics of the machine to process multiple layers reliably with a single setting. The bi-directional alignment tool enables true non-stochastic pattern placement and flexibly adapts to complex design variations. The optics package of NIKON NSR-2205EX12B consists of four laser beams for processing and alignment purposes. The lasers offer an accuracy of up to four microns, even at high magnifications, ensuring precise pattern placement and overlay accuracy. The asset also features two micro-diffraction lenses, which improve the resolution to sub-micron levels. The model is driven by a unique ultra-precision controller that can be programmed to multiple numeric recipes. The controller accurately calculates the path of the laser beams in order to maintain the highest pattern placement accuracy. This advanced controller greatly enhances the capability of the equipment to achieve device yield consistency. In addition to the precision controllers, the system features multiple features that provide further control and monitoring. These features include a real-time process monitor, a defect detection unit, and a heat compensation machine. The laser-based defect detection tool offers a crucial lifetime maintenance solution helping to prevent device contamination. Finally, the asset is designed for the most demanding semiconductor fabrication environments. It is inherently dust resistant, can sustain high operating temperature, and possesses low vibrations for tight overlay and resolution. With NSR-2205 EX12B, ever-shrinking device sizes can be confidently processed on the most challenging devices.
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