Used NIKON NSR 2205 i12D #9300305 for sale

NIKON NSR 2205 i12D wafer stepper is a premier lithography tool designed to produce circuits with dimensions as small as 12 nm gate lengths. The equipment incorporates an advanced twelve-axis stage to achieve maximum positional accuracy and nano-scale repeatability. It has a maximum stage moving speed of 200 mm/s and a stage positioning accuracy of 6 nm. It is equipped with a unique lensless imaging technique which uses a combination of a 'high-resolution stage interferometer' and a set of 'interactive laser-diode projections' for lithography. This combination allows for more accurate and precise imaging at finer feature sizes, enabling it to achieve 60 line and space resolution accuracy at a 10 nm process node. NIKON NSR-2205I12D utilizes a high-precision, high-speed scanning XY stage which helps ensure unmatched overlay accuracy within the entire wafer. An integrated scatterometer feature effectively detects topographical variations on the wafer surface, making it possible to generate higher performing devices which require very low distortion and defectivity. The system has an industry-leading 10-kW peak high-reflectance laser irradiation unit for faster, higher-precision imaging across the entire wafer, allowing it to achieve maximum productivity and top-notch device performance. To maximize the throughput and achieve industry-leading uniformity, the beam can be divided into multiple beams while preserving consistent performance across the entire wafer. NSR-2205I 12D wafer stepper also has integrated alignment markers to further enhance device performance and reduce defectivity, along with a user-friendly machine architecture with advanced automation. An intuitive graphical suite of controlling software supports OPC modeling as well as advanced lithography applications. To ensure ease-of-use and reliable performance, the tool also comes with a wide range of process and metrology assurance tools. It also has several models with various configurations, making it suitable for wafers of different sizes and materials. In addition to these features, NSR-2205I12D wafer stepper also comes with a range of service options such as rapid installation, training, and support. This allows for unparalleled performance and reliability, making it the ideal choice for precision lithography applications for small-dimension processes.