Used NIKON NSR-2205EX12C #9137681 for sale

NIKON NSR-2205EX12C
Manufacturer
NIKON
Model
NSR-2205EX12C
ID: 9137681
Stepper.
NIKON NSR-2205EX12C is a state-of-the-art wafer stepper. The stepper features a sophisticated algorithm driven design, which allows for precise and repeatable exposure of individual wafers or substrate panels. It provides high throughput and cost-saving solutions for a broad range of photolithography needs. The core of NSR-2205EX12C is its next-generation exposure equipment, using an advanced DIGITAL ILLUMINATION TECHNOLOGY (DIT) digital imaging system which provides a wider exposure range than traditional wafer steppers. Additionally, the unit has a built-in proprietary track machine, which tracks the position of each wafer and substrate panel as it passes through the tool, aiding in repeat exposure accuracy and significantly reducing errors in production. The asset incorporates a high-precision CCD Camera based alignment model which can ensure accuracy levels as high as 1.5 microns, during the post-exposure alignment process. The camera captures the point of exposure of each wafer or substrate panel, and uses the results to accurately compensate for any misalignments which could occur during the exposure process. The equipment also includes a high-precision SCHOTT plate aligner for pre-exposure alignment accuracy of 0.45 microns, ensuring that each substrate panel is accurately centered prior to exposure. NIKON NSR-2205EX12C also provides various systems to minimize and control resist thickness variation, including a Digital Edge Compensation (DEC) system which can accurately control the exposure across the edges, and a Digital Resining (DR) unit which can precisely control the resist thickness to each individual substrate panel. Additionally, it includes a highly advanced Vertical Developing Method (VDF), providing a more consistent post-exposure bake-to bake development process. Finally, NSR-2205EX12C includes an advanced optical lens machine, which can provide a broad range of focus, magnification, and numerical aperture adjustment options, with a maximum NA of 0.85, allowing for precise exposure of even the smallest features. Overall, NIKON NSR-2205EX12C is a highly advanced wafer stepper, providing a cost-effective and high throughput solution for photolithography applications.
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