Used ULTRATECH 1100 #9151421 for sale

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ULTRATECH 1100
Sold
Manufacturer
ULTRATECH
Model
1100
ID: 9151421
Wafer Size: 4"
Steppers, 4".
ULTRATECH 1100 wafer stepper is a fully automated and highly precise machine used to transfer nanopatterns onto semiconductor wafers in the microlithography industry. This stepper utilizes deep-UV lasers to produce an array of microscopic patterns onto the substrate's surface. The equipment is composed of two main parts: the scanner and the end-station. 1100 scanner includes three different stages: the projection lens, the image recording stage, and the drop-down mitigation stage. The projection lens directs a focused beam of light from a high-intensity deep-UV laser onto the mask located on the image recording stage. This recreates a device pattern onto the recording stage, which is then automatically moved in a synchronized manner to the drop-down mitigation stage. This stepper has the advantage of working at a wavelength of 248nm, with image resolution as high as 0.25 microns. Due to the use of a deep-UV laser, ULTRATECH 1100 is capable of transferring nano-scale patterns into structures with an aspect ratio of 20:1. The laser pulse length of the system is also adjustable, ranging from 8 to 32 microseconds, depending on the desired pattern size. In addition, 1100 has a process control layer which automates the process of machine setup. This feature eliminates the need for manual mask alignment and allows for consistent process parameters throughout the run. ULTRATECH 1100 wafer stepper is equipped with state-of-the-art optics to maintain high optical performance throughout the life of the machine. Additionally, the unit has a built-in safety machine that detects any potential breakdowns and automatically compensates for them to ensure reliable operation. 1100 is an all-in-one wafer stepper that utilizes a deep-UV laser source and advanced optics to accurately transfer nanoscale patterns onto semiconductor wafers. This tool's fully automated operation allows for consistent process parameters, while its safety asset ensures reliable operation. ULTRATECH 1100 is the perfect choice for the microlithography industry due to its advanced features and unparalleled precision.
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