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ULTRATECH 1500 MVS
Sold
Manufacturer
ULTRATECH
Model
1500 MVS
ID: 9097721
Stepper.
ULTRATECH 1500 MVS Wafer Stepper is a leading-edge next-generation solution for advanced semicondutor fabrication. Utilizing a patented variable slit scanning process, known as MVS (Multiple Viewing System) technology, 1500 MVS is able to deliver the highest throughput of any wafer stepper available. ULTRATECH 1500 MVS takes advantage of its MVS technology to image the entire wafer in one exposure, while simultaneously streamlining the imaging process. By dividing the wafer exposure into four separate slit designs, the process reduces optical misalignment, eliminates image stitching problems, and drastically reduces entire image distortion. The MVS also utilizes substrate carrier motion coupled with angular slit scanning, which yields the highest accuracy and speed for any wafer stepper. 1500 MVS Wafer Stepper also is equipped with an automated wafer mapping system for both simple and complex device geometries, as well as an ever-changing array of alignment marks for each device site. This feature ensures that accurate results are achieved while maintaining total control over the device alignment. ULTRATECH 1500 MVS also features a built-in high-precision frame grabber, which allows for the convenient observation and analysis of images as they are acquired. This means that immediate corrective action can be taken, if necessary, to rapidly resolve any discrepancies with the imaging process. 1500 MVS is an extremely user friendly wafer stepper that truly unites all the latest advancements in semiconductor wafer processing. It's innovative design features allow for the highest throughput available, while still maintaining accuracy and precision. And with its built-in frame grabber, users can observe and analyze the images as they are acquired. This further enhances ULTRATECH 1500 MVS's already reliable performance.
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