Used ULTRATECH 1500 MVS #9266754 for sale

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ULTRATECH 1500 MVS
Sold
Manufacturer
ULTRATECH
Model
1500 MVS
ID: 9266754
Stepper.
ULTRATECH 1500 MVS is an advanced wafer stepper designed for precision lithography used in production of semiconductor devices. It is part of the UltraStepper family of products which have been specifically designed to reduce cost and increase throughput while maintaining the highest levels of accuracy and quality. This equipment utilizes 5-axis motorized scanning stages and high accuracy encoders that measure and adjust stage position at each step. 1500 MVS has the capacity to handle glass substrates up to 156mm, solvent and thermal resistant masks up to 4" and a scanning speed of up to 1500mm/s. The wafer stepper also utilizes an advanced motion feedback control system for precise alignment of the stage and alignment of the exposure area in both X and Y axis. ULTRATECH 1500 MVS is also equipped with a two-axis optical unit which enables precise optical alignment of the mask and substrate prior to exposure. This machine also utilizes advanced imaging algorithms to monitor and adjust the motion of the stage during exposure. 1500 MVS offers a wide range of exposure patterns and features a "smart" edge-tiling tool which allows for multi-level patterns. This asset also includes a programmable scan pattern generator and supports various levels of resolution. The model is capable of both single and multiple exposures and can produce 0.1 um patterning accuracy and 0.001 um edge-placement accuracy. The equipment is able to store up to six recipes, making it ideal for high-volume environments. ULTRATECH 1500 MVS is designed to minimize contact between moving components, thereby increasing stability and extending its lifetime. Additionally, the wafer stepper features a robust structural design, allowing for reliable operation in industrial environments. ULTRATECH also provides a wide range of accessories and consumables to ensure optimal performance of the machine. With features such as an enhanced stepper control unit, temperature and humidity control, in-line particle monitoring and automatic job submission, 1500 MVS is the perfect tool for those seeking to produce high-quality wafer patterns.
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