Used ULTRATECH 1500 MVS #9267164 for sale

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ULTRATECH 1500 MVS
Sold
Manufacturer
ULTRATECH
Model
1500 MVS
ID: 9267164
Stepper With chuck, 6" Wafer handling: Autoloader, 6" (Cassette to cassette) Line resolution: 1.0 µm Depth of focus: Standard 3.0 µm at 1.0 µm lines Maximum square: 18 mm x 18 mm Maximum area: 34.2 mm x 13.6 mm Reticle size: 3" x 5" x 0.090" Alignment: WAS / MVS Computer: HP / HEWLETT-PACKARD 362.
ULTRATECH 1500 MVS (Multichannel Vibrating Sample) is a fully-automated, high-precision wafer stepper designed for semiconductor fabrication and research applications. This equipment is designed to accurately measure the microscopic features of wafers with sub-micron accuracy and can be configured to handle a wide variety of substrate sizes and shapes. The machine is capable of analyzing crystalline structures, doping concentrations, topography, surface composition, electrical properties, and other parameters. At its core, the system is comprised of three sub-systems - sample preparation, measurement, and analysis. The sample preparation unit is the key component of the machine, and includes an automated wet etching tool and a range of accessories for substrate preparation and handling. This asset can handle up to four wafers at any one time, and provides consistent quality with repeatable results. The measurement subsystem is fitted with two planar drive stages to ensure high precision and repeatability when scanning the substrate. The stages are capable of scanning substrates over a larger area than is possible with the sample preparation model, allowing for more detailed analysis. The mapping procedure is done by a single axis scanning mirror with a high dynamic range and precision. Finally, the analysis subsystem provides comprehensive post-processing of measurement data to determine the necessary parameters for fabrication or research. The data can be scaled and processed to create real-time and 3D graphic displays for evaluation. 1500 MVS is a highly versatile and precise wafer stepper, and is easy to operate with its automated sample preparation, measurement, and analysis sub-systems. The configuration can be changed to tailor the equipment to the needs of specific applications, and the graphical data displays are highly informative and can be quickly and easily manipulated to produce precise measurements. With its combination of superior performance and flexibility, ULTRATECH 1500 MVS offers an unparalleled level of accuracy and ease of use for semiconductor and research applications.
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