Used ADE / KLA / TENCOR 9500 UltraGage #186301 for sale

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ID: 186301
Wafer Size: 8"
Wafer dimensional measurement system, 8" High accuracy prealigner Thickness, Flatness, Bow/Warp measurement Manual or cassette load RT VAX 1000 Controller 15" LCD Monitor (1) Station (1) Elevator / cassette Unix version software Single cassette loader Utility: Power: 115/230V, 50~60HZ Vacuum: 25"Hg Operational Manual Can be inspected and demonstrated.
ADE / KLA / TENCOR 9500 UltraGage equipment is a wafer testing and metrology system designed to provide advanced quality control and accuracy for the semiconductor industry. The unit features an optical microscope for high-resolution imaging and feature recognition, as well as spectral imaging capabilities for quantifying machine performance. An automated stage allows for fast, non-destructive measurements of various types of wafers, including planar and non-planar applications. Active illumination technology enables dynamic lighting and shadowless viewing, which results in accurate feature recognition and automated event detection. The tool is equipped with an integrated micro-focus measurement asset that provides accuracy of up to 5µm across a 4" wafer. It also incorporates a high-resolution Non-Contact Measurement Model for static, multiplexed and repeat measurements. This equipment enables the accurate measurement of high-aspect-ratio features and assemblies. Other features include an automated stage for fast alignment and stepped traversing, an automated scanning system for repeated rapid process validation, dynamic data analysis for rapid unit assessment and customized workflows for specific applications. The UltraGage machine is also equipped with an automated defect inspection module which provides fast, reliable data on wafer quality. This module includes an array of specialized algorithms that leverage artificial intelligence and machine-learning techniques to detect, classify, and report defects. The tool is also capable of high-accuracy inline contour mapping of various assembly types. This occurs seamlessly and in real-time, providing detailed insights into how individual components are performing throughout manufacturing. All these features enable the asset to provide high-precision, low-cost wafer testing and metrology. The model is also configurable and supports several advanced integration techniques, including in-line measurements, statistical process control, and robotic interfaces. This interoperability provides a high degree of flexibility and scalability for ADE 9500 UltraGage equipment, enabling a wide range of advanced semiconductor applications.
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