Used ALLWIN21 AWgage 200 #9201797 for sale
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ID: 9201797
Wafer Size: 4"- 8"
Metal film metrology system, 4"- 8"
Main frame
Measurement head
Non-contact sheet resistance measurement
Measurement range: 1m W/sq to 19,990 W/sq
Consistent wafer-to-wafer process cycle repeatability
Wafer carriage travel programmed:
With internal encoder step motor
Without encoder disk
Test sights:
Single center-point
(5) Points
(9) Points
Highly conductive or metal sheet resistance:
1 to 1,999 mW/sq
1 to 1,999 W/sq
10 to 19,990 W/sq
Highly conductive or metal film thickness minimum:
100Å (Ångström) Maximum:
Proportional to resistivity
Maximum for a resistivity of 2.7 mW: 270 kÅ (27 mm)
Sheet resistance repeatability:
Range s/X (±%)
1 to 100 mW/sq 1
100 to 500 mW/sq 2
500 to 1000 mW/sq 4
1000 to 1,999 mW/sq 6
1,999 to 5,000 W/sq Consult factory
5000 to 10,000 W/sq Consult factory
10,000 to 15,000 W/sq Consult factory
Boards:
RF Tank circuit
Pentium® class computer
Main control
Motor control
Ports:
(2) USB
(2) Extra DB9
Touch screen GUI, 15"
Mouse & keyboard
Room temperature: 23° C
Power:
50/60Hz
Single phase
110/220VAC
2 Amps
CE Marked
Wafer loading: Manual.
ALLWIN21 AWgage 200 is a rapid thermal processor designed to quickly heat, cool, and transfer materials in a variety of semiconductor, photonics, and LED manufacturing processes. AWgage 200 can achieve extreme temperatures with speeds of up to 1,800 °C/min, making it suitable for many temperature-dependent applications. The equipment's unique die and wafer-based thermal technology helps to reduce programming, processing, and cycle time while preserving part integrity. Its flexibility allows for a wide variety of directional heating and cooling operations, as well as a wide range of programmable temperatures. ALLWIN21 AWgage 200 is capable of handling a variety of materials, including various semiconductor and photonic substrates, silicon wafers, aluminum oxide, sapphire, quartz, and diamond substrates. Its advanced thermal control technology also allows for precise temperature zone management and precise temperature rise rates to create well-defined temperature profiles. The system also features a vacuum-controlled ambient pressure chamber, cryogenic cooling capabilities, and an interchangeable material handling unit with separate pump and processing modules. AWgage 200 is designed with a user-friendly control machine that makes it easy to control and monitor the entire thermal process. The tool's continuous monitoring and reporting capabilities, provide detailed, real-time updates on asset operation, temperature control, and cycle times. Additionally, its turbo-charged air flow capabilities maintain process consistency by rapidly cooling parts heated by the thermal processor to allow for error-free post-process parts. ALLWIN21 AWgage 200 is a powerful, reliable, and flexible thermal processor offering precise temperature control, ultra-fast heating and cooling capabilities, and uniform heating/cooling coverage to quickly process a variety of materials. With its superior thermal engineering capabilities, AWgage 200 is an ideal solution for a variety of high-performance thermal processes.
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