Used EPIPLUS / ETAMAX Plato #9268807 for sale

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ID: 9268807
Vintage: 2010
Auto PL mapping system Missing parts: Robot Monitor 2010 vintage.
EPIPLUS / ETAMAX Plato is a wafer testing and metrology equipment designed to provide accurate measurements of critical parameters of thin-film, laser-scanned materials. It combines laser-assist measurement technology with high-resolution imaging to achieve maximum accuracy for wafer testing. The system features two different scanning modes: laser scanning and wide-field imaging. In the laser scan mode, a fine-tuned laser beam is focused onto a small portion of the wafer surface to generate a complete and accurate profile. This laser scanning is particularly useful for inspecting very fine structures such as semiconductors, MEMS components, small features, or ultra-thin layers. The wide-field imaging mode is less precise than the laser scanning, but it offers higher resolution, enabling accurate measurement of larger structures, such as flat panels, etched features, and patterned topography. This mode uses UV and infrared cameras to capture high-resolution images of the wafer from different angles. ETAMAX Plato unit can be used with a variety of material types and substrates, including full wafers, chips, and multi-layer substrates. It has a magnification range of 2-100X and provides precise measurements for a variety of parameters, such as surface roughness, dopants, topography, and spectral reflectance. The machine also offers advanced software, including pattern recognition, 3D imaging, and advanced data analysis capabilities. The software can be used to generate detailed analysis reports, which can be used to improve process yield. Furthermore, the tool is equipped with automated edge-detection to eliminate unwanted noise and distortion from the measurements. In addition, EPIPLUS Plato also includes an integrated management asset that allows users to keep track of results from tests carried out on multiple test wafers. As a result, quality control processes can be easily monitored and improved over time. Overall, Plato is a powerful wafer testing and metrology model designed to provide accurate and precise measurements for diverse materials and substrates. It offers advanced software and a range of features that can be used to improve process yield and quality control.
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